12 results
Effects of VUV and EUV Radiation on Ultra Low-k Materials Damage
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1559 / 2013
- Published online by Cambridge University Press:
- 29 May 2013, mrss13-1559-aa03-11
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- 2013
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Sealing of low-k dielectric (k=2.0) with self-assembled monolayers (SAMs) for the atomic layer deposition (ALD) of TiN
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1559 / 2013
- Published online by Cambridge University Press:
- 05 June 2013, mrss13-1559-aa05-22
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- 2013
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Optimization of low-k UV Curing: Effect of Wavelength on Critical Properties of the Dielectrics
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1156 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1156-D02-08
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- 2009
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Interaction of O and H Atoms with low-k SiOCH films pretreated in He plasma
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1156 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1156-D01-06
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- 2009
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Characterization of Plasma Damage in Low-k Films by TVS Measurements
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1156 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1156-D01-08
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- 2009
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Effects of Silica Sources on Nanoporous Organosilicate Films Templated with Tetraalkylammonium Cations
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1156 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1156-D03-01
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- 2009
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Plasma Modification Of Si-O-Si Bond Structure in Porous Sioch Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1079 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1079-N07-03
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- 2008
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Changes of UV Optical Properties of Plasma Damaged Low-k Dielectrics for Sidewall Damage Scatterometry
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1079 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1079-N07-04
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- 2008
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BCl3/N2 Plasma for Advanced non-Si Gate Patterning
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- Journal:
- MRS Online Proceedings Library Archive / Volume 913 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0913-D03-12
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- 2006
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Moisture Induced Degradation of Porous Low-k Materials
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- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F02-06
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- 2006
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Ellipsometric Porosimetry of Porous Low-k Films with Quazi-Closed Cavities
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- Journal:
- MRS Online Proceedings Library Archive / Volume 812 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, F5.4
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- 2004
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Modification of Nanoporous Silica Structures by Fluorocarbon Plasma Treatment
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- Journal:
- MRS Online Proceedings Library Archive / Volume 812 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, F6.7
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- 2004
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